产品性能
金属剥离胶膜厚 0.2-1.0μm;
内切深度控制;
良好的附着力;
良好工艺兼容性;
平坦化性能优异。
FEATURES
The thickness range of LR700 series :
0.2-5μm;
The under-cut length controllable;
Good adhesion;
Good process compatibility;
Excellent planarization performance. 产品型号 PRODUCT RANGE
Spin Curve Pattern Profiles
Product name LR712-100/020 LR711-200/100/050
Film thickness 1.5-0.8um 0.8-0.4